General Information
Revision date
2021-01-15
Product name
4MS
Product Synonyms
TETRAMETHYLSILANE; TETRAMETHYL SILANE; TMS; TMS (SILANE DERIVATIVE); UN 2749; C4H12Si
Chemical name
silanes
CAS No.
75-76-3
1.2.1 Relevant identified uses
semiconductor manufacture
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
OSHA HCS Classification
Flammable Liquids - Category 1 Hazardous to the Aquatic Environment - Chronic - Category 2
Signal word
Danger
Hazard statements
Extremely flammable liquid and vapor. Toxic to aquatic life with long lasting effects.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Keep container tightly closed. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Use only non-sparking tools. Take precautionary measures against static discharges. Wear protective gloves and eye/face protection. Avoid release to the environment.
Response
In case of fire, use media appropriate for extinction. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Collect spillage.
Storage
Store in a well-ventilated place. Keep cool.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
