General Information
Revision date
2021-09-02
Product name
11B-enriched boron trifluoride, hydrogen (13.6% - 63.97% by volume) mixture
Product Synonyms
Boron Trifluoride Enriched; Trifluoroborane-11B; Boron Trifluoride B-11 Enriched; 11BF3
Chemical name
Mixtures of gases, boron halides, fluorides, hydrogen
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
1-800-424-9300, 1-703-527-3887
Icons in SDS
Company Information
company name
Entegris, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of
Signal word
Danger
Hazard statements
Extremely flammable gas. Contains gas under pressure; may explode if heated. May displace oxygen and cause rapid suffocation. Toxic if inhaled. Causes severe skin burns and eye damage. May cause damage to organs. (cardiovascular system , respiratory system ) May cause drowsiness or dizziness. Causes damage to organs through prolonged or repeated exposure. (kidneys , respiratory system ) May cause damage to organs through prolonged or repeated exposure. (skeletal system , teeth ) Harmful to aquatic life with long lasting effects.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Do not breathe gas. Wash thoroughly after handling. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area. Wear protective gloves/protective clothing/eye protection/face protection. Avoid release to environment.
Response
Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. These cylinders may not be fitted with a pressure relief device. If exposed or concerned: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment may be needed, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Protect from sunlight. Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Aquatic Toxicity 63.97% of the mixture consists of ingredient(s) of unknown acute aquatic toxicity. 63.97% of the mixture consists of ingredient(s) of unknown chronic aquatic toxicity.
2.3 Other hazards
May cause frostbite upon sudden release of liquefied gas. One of the components is an asphyxiant, consider oxygen.