11B-enriched boron trifluoride, hydrogen (13.6% - 63.97% by volume) mixture

Entegris, Inc

Revision date : 2021-09-02

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GHS02 GHS04 GHS05 GHS06 GHS07 GHS08
Health risk rating 5
Safety risk rating 4
Environmental risk rating 5

General Information

Revision date

2021-09-02

Product name

11B-enriched boron trifluoride, hydrogen (13.6% - 63.97% by volume) mixture

Product Synonyms

Boron Trifluoride Enriched; Trifluoroborane-11B; Boron Trifluoride B-11 Enriched; 11BF3

Chemical name

Mixtures of gases, boron halides, fluorides, hydrogen

1.2.1 Relevant identified uses

semiconductor manufacture

Emergency telephone

1-800-424-9300, 1-703-527-3887

Icons in SDS

GHS02 GHS04 GHS05 GHS06 GHS07 GHS08

Company Information

company name

Entegris, Inc

e-mail address of the competent person responsible for the Safety Data Sheet

Product.stewardship@entegris.com

GHS Information

Signal word

Danger

Section 2

SECTION 2: Hazards identification

Classification in accordance with paragraph (d) of 29 CFR 1910.1200. Classification in accordance with paragraph (d) of

Signal word

Danger

Hazard statements

Extremely flammable gas. Contains gas under pressure; may explode if heated. May displace oxygen and cause rapid suffocation. Toxic if inhaled. Causes severe skin burns and eye damage. May cause damage to organs. (cardiovascular system , respiratory system ) May cause drowsiness or dizziness. Causes damage to organs through prolonged or repeated exposure. (kidneys , respiratory system ) May cause damage to organs through prolonged or repeated exposure. (skeletal system , teeth ) Harmful to aquatic life with long lasting effects.

Prevention

Keep away from heat/sparks/open flame/hot surfaces - No smoking. Do not breathe gas. Wash thoroughly after handling. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area. Wear protective gloves/protective clothing/eye protection/face protection. Avoid release to environment.

Response

Leaking gas fire: Do not extinguish, unless leak can be stopped safely. Eliminate all ignition sources if safe to do so. These cylinders may not be fitted with a pressure relief device. If exposed or concerned: Call a POISON CENTER or doctor/physician. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. Specific treatment may be needed, see first aid section of Safety Data Sheet. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.

Storage

Protect from sunlight. Store in a well-ventilated place. Keep container tightly closed. Store locked up.

Disposal

Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Aquatic Toxicity 63.97% of the mixture consists of ingredient(s) of unknown acute aquatic toxicity. 63.97% of the mixture consists of ingredient(s) of unknown chronic aquatic toxicity.

2.3 Other hazards

May cause frostbite upon sudden release of liquefied gas. One of the components is an asphyxiant, consider oxygen.

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