General Information
Revision date
2021-01-21
Product name
4MS
Substance name
Tetramethylsilane
Product Synonyms
TETRAMETHYLSILANE; TETRAMETHYL SILANE; TMS; TMS (SILANE DERIVATIVE); C4H12Si
Chemical name
silanes
CAS No.
75-76-3
1.2.1 Relevant identified uses
semiconductor manufacture
1.2.2. Uses advised against
Cannot be distributed to the general public
supplier name
Tetra Tech International, Inc
Emergency telephone
+1-703-527-3887 (24 hours) - CHEMTREC – International
Icons in SDS
Company Information
company name
Tetra Tech International, Inc
e-mail address of the competent person responsible for the Safety Data Sheet
reach@tetratech.com, Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H224, H411
Hazard statements
Code
Statements
H224
Extremely flammable liquid and vapour
Section 2
CLP CLASSIFICATION
Flammable Liquids - Category 1 Hazardous to the Aquatic Environment - Chronic - Category 2
2.2 Label elements
Labeling according to Regulation (EC) No. 1272/2008 [CLP]
Signal word
Danger
Hazard statements
H224 Extremely flammable liquid and vapor. H411 Toxic to aquatic life with long lasting effects.
Prevention
P210 Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking. P233 Keep container tightly closed. P240 Ground/Bond container and receiving equipment. P241 Use explosion-proof electrical/ventilating/lighting equipment. P242 Use only non-sparking tools. P243 Take action to prevent static discharges. P280 Wear protective gloves/protective clothing/eye protection/face protection. P273 Avoid release to the environment.
Response
P370+P378 In case of fire: Use appropriate media to extinguish. P303+P361+P353 IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. P391 Collect spillage.
Storage
P403+P235 Store in a well-ventilated place. Keep cool.
Disposal
P501 Dispose of contents/container in accordance with local/regional/national/international regulations.
2.3 Other hazards
None known.
