TETRAFLUOROMETHANE (CF4)

BOC LIMITED (AUSTRALIA)

Revision date : 2010-12-09

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Health risk rating 1
Safety risk rating 1
Environmental risk rating 1

Note: Ingredients listed on restricted chemical lists

EC/CAS

75-73-0

Name of the chemical

Tetrafluoro-methane

Concentration

99.999%

General Information

Revision date

2010-12-09

Product name

TETRAFLUOROMETHANE (CF4)

Product Synonyms

205 - SDS NUMBER • FREON 14 • HALOCARBON 14 • REFRIGERANT 14

CAS No.

75-73-0

1.2.1 Relevant identified uses

REACTION GAS IN PLASMA CHAMBER FOR SILICON CHIPS

supplier name

BOC LIMITED (AUSTRALIA)

Icons in SDS

M017 M070 T018

Company Information

company name

BOC LIMITED (AUSTRALIA)

Section 2

SECTION 2: Hazards identification

NOT CLASSIFIED AS HAZARDOUS ACCORDING TO SAFE WORK AUSTRALIA CRITERIA CLASSIFIED AS A DANGEROUS GOOD BY THE CRITERIA OF THE ADG CODE UN No. 1982 DG Class Subsidiary Risk(s) None Allocated Packing Group None Allocated Hazchem Code 2TE

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