General Information
Version
ALFAAA15139
Revision date
2026-07-25
Product name
Hexamethyldisilazane
Product Synonyms
HMDS
CAS No.
999-97-3
supplier name
Avocado Research Chemicals Ltd
Emergency telephone
001-201-796-7100, +32 14 57 52 99, 001-800-424-9300, 001-703-527-3887
Icons in SDS
Company Information
company name
Avocado Research Chemicals Ltd
e-mail address of the competent person responsible for the Safety Data Sheet
begel.sdsdesk@thermofisher.com
GHS Information
Signal word
Danger
Hazard Codes
Hazard statements (CLP)
H225, H302, H311+H331, H314, H335, H370, H412
Hazard statements
Code
Statements
H225
Highly Flammable liquid and vapour
Section 2
SECTION 2: Hazards identification
Physical State
Appearance/Odor
Liquid Colorless Odorless Emergency Overview Highly flammable liquid and vapor. Toxic in contact with skin. Toxic if inhaled. Causes severe skin burns and eye damage. Causes damage to organs. May cause respiratory irritation. Harmful to aquatic life with long lasting effects. Harmful if swallowed. Moisture sensitive. Classification of the substance or mixture Flammable liquids Category 2 Acute Oral Toxicity Category 4 Acute Dermal Toxicity Category 3 Acute Inhalation Toxicity - Vapors Category 3 Skin Corrosion/Irritation Category 1 Serious Eye Damage/Eye Irritation Category 1 Specific target organ toxicity - (single exposure) Category 1 Category 3 Chronic aquatic toxicity Category 3 Label Elements
Signal word
Danger Hazard Statements H225 - Highly flammable liquid and vapor H314 - Causes severe skin burns and eye damage H370 - Causes damage to organs H335 - May cause respiratory irritation H412 - Harmful to aquatic life with long lasting effects H302 - Harmful if swallowed H311 + H331 - Toxic in contact with skin or if inhaled
Prevention
P210 - Keep away from heat, hot surfaces, sparks, open flames and other ignition sources. No smoking P233 - Keep container tightly closed P240 - Ground and bond container and receiving equipment P241 - Use explosion-proof electrical/ ventilating/ lighting equipment P242 - Use non-sparking tools P243 - Take action to prevent static discharges P261 - Avoid breathing dust/fume/gas/mist/vapors/spray P264 - Wash face, hands and any exposed skin thoroughly after handling P270 - Do not eat, drink or smoke when using this product P271 - Use only outdoors or in a well-ventilated area P280 - Wear protective gloves/protective clothing/eye protection/face protection
Response
P303 + P361 + P353 - IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water or shower P304 + P340 - IF INHALED: Remove person to fresh air and keep comfortable for breathing P312 - Call a POISON CENTER or doctor if you feel unwell P330 - Rinse mouth P370 + P378 - In case of fire: Use dry sand, dry chemical or alcohol-resistant foam to extinguish P362 + P364 - Take off contaminated clothing and wash it before reuse
Storage
P403 + P235 - Store in a well-ventilated place. Keep cool P405 - Store locked up
Disposal
P501 - Dispose of contents/ container to an approved waste disposal plant
Other physicochemical hazards
Vapors may cause flash fire or explosion. Highly flammable. Water reactive.
Health hazards
Toxic in contact with skin. Toxic if inhaled. Harmful if inhaled. Corrosive. Causes skin and eye burns. Causes serious eye damage. Causes damage to organs. May cause respiratory irritation. Harmful if swallowed.
Environmental hazards
Harmful to aquatic life with long lasting effects. Is not likely mobile in the environment. Reacts with water.
2.3 Other hazards
Toxic to terrestrial vertebrates. This product does not contain any known or suspected endocrine disruptors.
2.1 Classification of the substance or mixture
Flammable liquids. Category 2 Acute Oral Toxicity Category 4 Acute Dermal Toxicity Category 3 Acute Inhalation Toxicity - Vapors Category 3 Skin Corrosion/Irritation Category 1 Serious Eye Damage/Eye Irritation Category 1 Specific target organ toxicity - (single exposure) Category 1 Category 3 Chronic aquatic toxicity