SiCl4; 四氯化硅

ATMI International Trading Co, LTD

Revision date : 2021-06-02

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GHS05 GHS06 GHS07 GHS08
Health risk rating 1
Safety risk rating 1
Environmental risk rating 1

General Information

Revision date

2021-06-02

Product name

SiCl4; 四氯化硅

Product Synonyms

SILICON CHLORIDE; TETRACHLOROSILANE; SILICON TETRACHLORIDE; TETRACHLOROSILICON; PERCHLOROSILANE; SILICON CHLORIDE (SiCl4); SILICON(IV) CHLORIDE; UN 1818; Cl4Si

Chemical name

Halogenated Silane

CAS No.

10026-04-7

1.2.1 Relevant identified uses

semiconductor manufacture

Icons in SDS

GHS06 GHS07

Company Information

company name

ATMI International Trading Co, LTD

e-mail address of the competent person responsible for the Safety Data Sheet

Product.stewardship@entegris.com

GHS Information

Signal word

Danger

Section 2

SECTION 2: Hazards identification

Emergency Overview Clear liquid. Reacts violently with water. Toxic if inhaled. Causes skin irritation. Causes serious eye irritation. May cause respiratory irritation.

Classification according to GHS

according to GB 30000.2-GB 30000.29) Acute Toxicity - Inhalation - Vapor - Category 3 Skin Corrosion/Irritation - Category 2 Serious Eye Damage/Eye Irritation - Category 2A Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system )

2.2 Label elements

1 / 9 Page

Signal word

Danger

Hazard statements

Toxic if inhaled. Causes skin irritation. Causes serious eye irritation. May cause respiratory irritation.

Prevention

Avoid breathing vapor or mist. Wash thoroughly after handling. Wear protective gloves and eye/face protection. Use only outdoors or in a well-ventilated area.

Response

IF INHALED: Remove person to fresh air and keep comfortable for breathing. Call a POISON CENTER or doctor/physician. IF ON SKIN: Wash with plenty of soap and water. If skin irritation occurs: Get medical advice/attention. Take off contaminated clothing and wash before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/attention.

Storage

Store in a well-ventilated place. Keep container tightly closed. Store locked up.

Disposal

Dispose of contents/container in accordance with local/regional/national/international regulations.

Other physicochemical hazards

Reacts violently with water.

Health hazards

Toxic if inhaled. Causes skin irritation. Causes serious eye irritation. May cause respiratory irritation.

Environmental effects

No data available

Other hazards which do not result in classification

Reacts violently with water.

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