Note: Ingredients listed on restricted chemical lists
EC/CAS
7664-39-3
Name of the chemical
Hydrofluoric acid, its normal salts, its complexes and hydrofluorides with the exception of those given in Annex III
Concentration
N/A
General Information
Revision date
2019-02-26
Product name
PlanarEx 2110
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
Call
Icons in SDS
Company Information
company name
ATMI International Trading Co, LTD
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Emergency Overview Clear liquid. Toxic if inhaled. Harmful if swallowed. May be harmful in contact with skin. Causes severe skin burns and eye damage. May cause respiratory irritation.
Classification according to GHS
according to GB 30000.2-GB 30000.29) Acute Toxicity - Oral - Category 4 Acute Toxicity - Dermal - Category 5 Acute Toxicity - Inhalation - Dust/Mist - Category 3 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system )
Signal word
Danger
Hazard statements
Toxic if inhaled. Harmful if swallowed. May be harmful in contact with skin. Causes severe skin burns and eye damage. May cause respiratory irritation.
Prevention
Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Use only outdoors or in a well-ventilated area. Do not eat, drink or smoke when using this product.
Response
Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in a well-ventilated place. Keep container tightly closed. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
Other physicochemical hazards
No data available
Health hazards
Toxic if inhaled. Harmful if swallowed. May be harmful in contact with skin. Causes severe skin burns and eye damage. May cause respiratory irritation.
Environmental effects
No data available
Other hazards which do not result in classification
None known.
