General Information
Revision date
2021-11-01
Product name
Fluorine Scrubber; 氟洗涤器
1.2.1 Relevant identified uses
Removal of halogenated gases from semiconductor manufacturing processes
Emergency telephone
Call
Icons in SDS
Company Information
company name
ATMI International Trading Co, LTD
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Emergency Overview White solid. May be harmful if inhaled. May be harmful in contact with skin. Causes skin irritation. Causes serious eye irritation. Causes damage to organs. Causes damage to organs through prolonged or repeated exposure. Harmful to aquatic life.
Classification according to GHS
according to GB 30000.2-GB 30000.29) Acute Toxicity - Dermal - Category 5 (5% unknown ) Acute Toxicity - Inhalation - Dust/Mist - Category 5 (5% unknown ) Skin Corrosion/Irritation - Category 2 1 / 9 Page Serious Eye Damage/Eye Irritation - Category 2A Specific Target Organ Toxicity - Single Exposure - Category 1 ( respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( respiratory system ) Hazardous to the Aquatic Environment - Acute - Category 3
Signal word
Danger
Hazard statements
May be harmful in contact with skin. May be harmful if inhaled. Causes skin irritation. Causes serious eye irritation. Causes damage to organs. (respiratory system ) Causes damage to organs through prolonged or repeated exposure. (respiratory system ) Harmful to aquatic life.
Prevention
Do not breathe dust. Wear protective gloves and eye/face protection. Wash thoroughly after handling. Do not eat, drink or smoke when using this product. Avoid release to the environment.
Response
If exposed or concerned: Call a POISON CENTER or doctor/physician. IF INHALED: Call a POISON CENTER or doctor/physician if you feel unwell. IF ON SKIN: Wash with plenty of soap and water. If skin irritation occurs: Get medical advice/attention. Take off contaminated clothing and wash before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/attention.
Storage
Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Dermal 5% of the mixture consists of ingredient(s) of unknown acute toxicity. Inhalation 5% of the mixture consists of ingredient(s) of unknown acute toxicity.
Other physicochemical hazards
No data available
Health hazards
May be harmful if inhaled. May be harmful in contact with skin. Causes skin irritation. Causes serious eye irritation. Causes damage to organs. Causes damage to organs through prolonged or repeated exposure.
Environmental effects
Harmful to aquatic life. 2 / 9 Page
Other hazards which do not result in classification
In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous.