Fluorine Scrubber; 氟洗涤器

ATMI International Trading Co, LTD

Revision date : 2021-11-01

SDS Library

Move your SDS library online today

Check Icon
Setup – Easy setup with our database of 16 million+ SDSs
Check Icon
Up-to-date – Your SDS get updated to latest versions.
Check Icon
Employee access – Tablets, Smartphones, or link from Corporate Intranet
Check Icon
Safety – One-click access to first aid information.
Check Icon
Labels – Generate Secondary Container Labels with just one click.
GHS05 GHS06 GHS07 GHS08
Health risk rating 5
Safety risk rating 5
Environmental risk rating 5

General Information

Revision date

2021-11-01

Product name

Fluorine Scrubber; 氟洗涤器

1.2.1 Relevant identified uses

Removal of halogenated gases from semiconductor manufacturing processes

Emergency telephone

Call

Icons in SDS

Company Information

company name

ATMI International Trading Co, LTD

e-mail address of the competent person responsible for the Safety Data Sheet

Product.stewardship@entegris.com

GHS Information

Signal word

Danger

Section 2

SECTION 2: Hazards identification

Emergency Overview White solid. May be harmful if inhaled. May be harmful in contact with skin. Causes skin irritation. Causes serious eye irritation. Causes damage to organs. Causes damage to organs through prolonged or repeated exposure. Harmful to aquatic life.

Classification according to GHS

according to GB 30000.2-GB 30000.29) Acute Toxicity - Dermal - Category 5 (5% unknown ) Acute Toxicity - Inhalation - Dust/Mist - Category 5 (5% unknown ) Skin Corrosion/Irritation - Category 2 1 / 9 Page Serious Eye Damage/Eye Irritation - Category 2A Specific Target Organ Toxicity - Single Exposure - Category 1 ( respiratory system ) Specific Target Organ Toxicity - Repeated Exposure - Category 1 ( respiratory system ) Hazardous to the Aquatic Environment - Acute - Category 3

Signal word

Danger

Hazard statements

May be harmful in contact with skin. May be harmful if inhaled. Causes skin irritation. Causes serious eye irritation. Causes damage to organs. (respiratory system ) Causes damage to organs through prolonged or repeated exposure. (respiratory system ) Harmful to aquatic life.

Prevention

Do not breathe dust. Wear protective gloves and eye/face protection. Wash thoroughly after handling. Do not eat, drink or smoke when using this product. Avoid release to the environment.

Response

If exposed or concerned: Call a POISON CENTER or doctor/physician. IF INHALED: Call a POISON CENTER or doctor/physician if you feel unwell. IF ON SKIN: Wash with plenty of soap and water. If skin irritation occurs: Get medical advice/attention. Take off contaminated clothing and wash before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. If eye irritation persists: Get medical advice/attention.

Storage

Store locked up.

Disposal

Dispose of contents/container in accordance with local/regional/national/international regulations. Statement(s) of Unknown Acute Toxicity Dermal 5% of the mixture consists of ingredient(s) of unknown acute toxicity. Inhalation 5% of the mixture consists of ingredient(s) of unknown acute toxicity.

Other physicochemical hazards

No data available

Health hazards

May be harmful if inhaled. May be harmful in contact with skin. Causes skin irritation. Causes serious eye irritation. Causes damage to organs. Causes damage to organs through prolonged or repeated exposure.

Environmental effects

Harmful to aquatic life. 2 / 9 Page

Other hazards which do not result in classification

In normal use, as installed and maintained according to product literature, this material in its final form is not expected to be hazardous.

SDS Library

Move your SDS library online today

Check Icon
Setup – Easy setup with our database of 16 million+ SDSs
Check Icon
Up-to-date – Your SDS get updated to latest versions.
Check Icon
Employee access – Tablets, Smartphones, or link from Corporate Intranet
Check Icon
Safety – One-click access to first aid information.
Check Icon
Labels – Generate Secondary Container Labels with just one click.