General Information
Revision date
2020-06-10
Product name
Bis(diethylamino)silane
Chemical name
organometallic
CAS No.
27804-64-4
1.2.1 Relevant identified uses
semiconductor manufacture
Emergency telephone
Call
Icons in SDS
Company Information
company name
ATMI International Trading Co, LTD
e-mail address of the competent person responsible for the Safety Data Sheet
Product.stewardship@entegris.com
GHS Information
Signal word
Danger
Section 2
SECTION 2: Hazards identification
Emergency Overview Clear liquid. Highly flammable liquid and vapor. In contact with water releases flammable gases which may ignite spontaneously. Harmful if inhaled. Harmful if swallowed. Causes severe skin burns and eye damage. May cause respiratory irritation.
Classification according to GHS
according to GB 30000.2-GB 30000.29) Flammable Liquids - Category 2 Substances and Mixtures which, in Contact with Water, Emit Flammable Gases - Category 1 Acute Toxicity - Oral - Category 4 Acute Toxicity - Inhalation - Vapor - Category 4 Skin Corrosion/Irritation - Category 1 Serious Eye Damage/Eye Irritation - Category 1 Specific Target Organ Toxicity - Single Exposure - Category 3 ( respiratory system ) 1 / 9 Page
Signal word
Danger
Hazard statements
Highly flammable liquid and vapor. In contact with water releases flammable gases which may ignite spontaneously. Harmful if inhaled. Harmful if swallowed. Causes severe skin burns and eye damage. May cause respiratory irritation.
Prevention
Keep away from heat/sparks/open flame/hot surfaces - No smoking. Keep container tightly closed. Ground/Bond container and receiving equipment. Use explosion-proof electrical/ventilating/lighting equipment. Use only non-sparking tools. Take precautionary measures against static discharge. Handle under inert gas. Protect from moisture. Do not allow contact with water. Do not breathe vapor or mist. Wash thoroughly after handling. Wear protective gloves/protective clothing/eye protection/face protection. Do not eat, drink or smoke when using this product. Use only outdoors or in a well-ventilated area.
Response
In case of fire: Use appropriate media to extinguish. Immediately call a POISON CENTER or doctor/physician. IF INHALED: Remove person to fresh air and keep comfortable for breathing. IF ON SKIN (or hair): Take off immediately all contaminated clothing. Rinse skin with water/shower. Brush off loose particles from skin. Immerse in cool water/wrap in wet bandages. Wash contaminated clothing before reuse. IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continue rinsing. IF SWALLOWED: Rinse mouth. Do NOT induce vomiting.
Storage
Store in a dry place. Store in a well-ventilated place. Keep container tightly closed. Keep cool. Store locked up.
Disposal
Dispose of contents/container in accordance with local/regional/national/international regulations.
Other physicochemical hazards
Highly flammable liquid and vapor. In contact with water releases flammable gases which may ignite spontaneously. Reacts violently with water.
Health hazards
2 / 9 Page Harmful if inhaled. Harmful if swallowed. Causes severe skin burns and eye damage. May cause respiratory irritation.
Environmental effects
No data available
Other hazards which do not result in classification
Reacts violently with water.