GREEN - Silicon Nitride Etch

Accelerated Analysis

Revision date : 2017-09-15

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GHS07
Health risk rating 2
Safety risk rating 1
Environmental risk rating 1

Note: Ingredients listed on restricted chemical lists

EC/CAS

12125-01-8

Name of the chemical

Ammonium fluoride

Concentration

<5%

Listed in

General Information

Version

5.0

Revision date

2017-09-15

Product name

GREEN - Silicon Nitride Etch

1.2.1 Relevant identified uses

This product is intended for selective removal of Silicon Nitride film from semiconductor devices

Manufacturer Name

Accelerated Analysis

Icons in SDS

GHS07 M004 M009 M010 M011

Company Information

company name

Accelerated Analysis

GHS Information

Signal word

Warning

Hazard Codes

Hazard statements (CLP)

H315, H320, H336

Hazard statements

Code

Statements

H315

Causes skin irritation

Section 2

SECTION 2: Hazards identification

Signal word

Warning

Hazard statements

Causes skin irritation Causes eye irritation May cause drowsiness or dizziness

Prevention

Do not breathe dust/fume/gas/mist/vapors/spray. Use only in a well-ventilated area.

Response

Get medical attention/advice if you feel unwell. Inhalation IF INHALED: Remove person to fresh air and keep at rest in a position comfortable for breathing. Call a POISON CENTER or doctor/physician if you feel unwell.

Storage

Store in a well-ventilated place. Keep container tightly closed. Store locked up.

Disposal

Dispose of contents/container to an approved waste disposal plant

2.3 Other hazards

- none identified

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